English Books > Technical > Metallurgy > Advanced Metallization for ULSI Applications

Advanced Metallization for ULSI Applications
Hardback; Book
577 pages
Published: April 1992
Materials Research Society
ISBN: 1558991522
This item non-returnable. Order may not be canceled.

Featuring 77 papers from an MRS conference held in October 1991, this book examines tungsten metallization as well as other advance metals, such as Cu, Al, PVD/CVD TiN, and processes such as chemical mechanical planarization and low dielectric insulators.



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