English Books > Science > General > Nanolithography: a Borderland Between STM, EB, IB, and X-ray Lithographies

Nanolithography: a Borderland Between STM, EB, IB, and X-ray Lithographies
Hardback; Book; Indexes
228 pages
Published: April 1994
Kluwer Academic Publishers Group
ISBN: 0792327942
This item non-returnable. Order may not be canceled.

Contains updated reviews by experts on the well established techniques of lithography - electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) - as well as on emergent techniques, such as scanning tunnelling lithography (STL).



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